模块6DD1684-0FF0

模块6DD1684-0FF0

模块6DD1684-0FF0

模块6DD1684-0FF0

模块6DD1684-0FF0

设计和功能

设计

S7-300 可以实现空间节省和模块式组态。除了模块，只需要一条 DIN 安装轨用于固定模块并把它们旋转到位。

这样就实现了坚固而且具有 EMC 兼容性的设计。

随用随建式的背板总线可以通过简单的插入附加的模块和总线连接器进行扩展。S7-300 系列丰富的产品既可以用于集中扩展，也可用于构建带有 ET 200M 的分布式结构；因此实现了经济的备件控制。

NOVELLUS 04-731602-02 SHIELD (CLEANED)

NOVELLUS 04-732004-01 TUBE,INSULATOR

NOVELLUS 04-732026-02 CABLE ASSY

NOVELLUS 04-733008-01 ARM, HOLDER

NOVELLUS 04-8120205-00 KIT,OEPD,DUAL,STD ALTUS

NOVELLUS 05-00007-00 PM,KIT,REACTOR CHAMBER

NOVELLUS 05-00009-00 KIT PM POU/SI FILLTER

NOVELLUS 05-00011-00 PM KIT GAS FEED-THRU

NOVELLUS 05-00023-00 PM KIT SEMI ANNUAL

NOVELLUS 05-00066-00 KIT PM REACT 200MM

NOVELLUS 05-00077-00 KIT PM ROBOT SEALS

NOVELLUS 05-00108-00 PM KIT, LOAD LOCK FILTERS C1-W

NOVELLUS 05-00110-00 PM KIT TEE SEALS C1W

NOVELLUS 05-05028-05 DC-DC CONVERTOR CYMER

NOVELLUS 05-10347-00 KIT PM N2FILTER1

NOVELLUS 05-10348-00 KIT, PM T-SEAL

NOVELLUS 05-124534-00 KIT O-RING SPEED CHAMBER

NOVELLUS 05-126872-00 KIT, CPEC, 200MM NOTCHED

NOVELLUS 05-14-067-00 V-BELT (POSITIONING)

NOVELLUS 05-3332 EXTENDER TOP COVER SAPPHIRE PL

NOVELLUS 05-50002-00 KIT, FILTER, 0.05 MICRON

NOVELLUS 05-50014-00 WATER FLOW S/W

NOVELLUS 05-50020-00 VACUUM BOX KIT

NOVELLUS 05-50033-00 KIT, CASSETTE HOOKS/SENSORS

NOVELLUS 05-50045-00 KIT ROTATION DRIVE

NOVELLUS 05-50069-00 KIT ROTATION DRIVE

NOVELLUS 06-0150 QTZ PIN

NOVELLUS 06-08140-00 CERAMIC RING

NOVELLUS 06-2605 KEY ISOLATION PLATE AL

NOVELLUS 06-2624 PLATE TOP UPPER

NOVELLUS 06-2625 PLATE BOTTOM

NOVELLUS 06-2640 SPOOL, QUARTZ

NOVELLUS 06-2654 ORIFICE,BOTTOM SAPPHIRE,ASTEX

NOVELLUS 06-2725 SHOWER HEAD,TUBE 1.83ID

NOVELLUS 06-2726 SHOWER HEAD,BOTTOM,SAPPH

NOVELLUS 062-00016-00 FLAG

NOVELLUS 07-20216-01 LEAD NUT ANTI-ROTATION

NOVELLUS 0700-700837 GASKET, PLATE COVER

NOVELLUS 0700-717454 DELRIN RING, .590 THK

NOVELLUS 0700-717577 SEAL, SLINGER SPIN ARM DELRIN

NOVELLUS 0700-727372 SEAL, SLINGER

NOVELLUS 0710-110107 SWITCH SELECTOR CONTROL UNIT(IDEC ABN1ZC1)

NOVELLUS 0710-120033 SWITCH SELECTOR CONTROL UNIT(IDEC TK1557 ASN33ZC6)

NOVELLUS 0710-717547 CLAMP, U BAND UP RING INTG PAD

NOVELLUS 0710-727158 CONNECTOR, SLURRY SHIELD RING

NOVELLUS 0710-738898 SHEET, ABRASIVE CND BLADDERLES

NOVELLUS 0720-111545 RING, CYLINDER WAFER BELL COUP

NOVELLUS 0720-700370 MOUNT, BULKHEAD PANEL

NOVELLUS 0720-717415 MOUNT, WAFER CARRIER

NOVELLUS 0720-718327 RING,STRIP BUMPER

NOVELLUS 0730-700047 BUSHING

NOVELLUS 0750-700181 CYLINDER,ROTATE

NOVELLUS 0750-700181 CYLINDER,ROTATE

NOVELLUS 0750-717491 CYLINDER,AIR,GAARD,ARM

NOVELLUS 0790-738891 BASE, PAD BLADDERLESS COND.

NOVELLUS 08-19891-026 SHIELD UV LARGE CLEAR

NOVELLUS 08-19891-027 WINDOW VIEWPORT QUARTZ T LARGE 5-7/8 X

NOVELLUS 08-21006-030 WINDOW VIEWPORT GLASS ASPR

NOVELLUS 08-21427-006 WINDOW QUARTZ EPD

NOVELLUS 08-22233-010 WINDOW VIEWPORT QUARTZ REAR (MCPAC 150)

NOVELLUS 08-22233-011 WINDOW UV SHIELD REAR MCPAC 150

NOVELLUS 08-22249-001 GATE VALVE

NOVELLUS 08-22434-001 WAFER MANIHOLDE ASSY

NOVELLUS 08-22434-051 COLLIMATOR OXIDE

NOVELLUS 08-22816-006 PLATE ADAPTER

NOVELLUS 08-24258-000 SUBSTRATE FAB FLAT BARE 150MM

NOVELLUS 08-24747-020 BELLOWS LIFTER R I E

NOVELLUS 08-30293-081 CLAMP CAP

NOVELLUS 08-34733-000 SUBSTRATE ASPR-CLL 125MM

NOVELLUS 10-00033-00 BACKFILL FILTER

NOVELLUS 10-00034-00 WELDMENT, GAS TUBE

NOVELLUS 10-00036-00 GAS LINE

NOVELLUS 10-00172-00 LINE TEFLON PIPE SIH4

NOVELLUS 10-00223-00 TUBE ASSY, .007 INJECTOR

NOVELLUS 10-00285-02 TUBE-LONG SHWR COOL

NOVELLUS 10-00346-02 TUBE ASSY

NOVELLUS 10-00360-00 DEGAS BY-PASS TUBE ASSY

NOVELLUS 10-00360-00 DEGAS BY-PASS TUBE ASSY

NOVELLUS 10-00376-00 ADAPTER, 1/8" VCR MALE TO LFC

NOVELLUS 10-00416-00 TUBE,BOTTOM

NOVELLUS 10-00417-00 TUBE,UPPER

NOVELLUS 10-00418-00 TUBE,LOWER

NOVELLUS 10-00419-00 TUBE,UPPER

NOVELLUS 10-00420-00 TUBE,LOWER

NOVELLUS 10-00421-00 TUBING, PURGE LINE, 1/16"

NOVELLUS 10-027392-00 Tube Divert for 8 channel box

NOVELLUS 10-029376-00 TUBE ASSY D MAN/CRYO BRK

NOVELLUS 10-042661-00 TUBE ASSY,MANIFOLD B&E

NOVELLUS 10-046842-00 C1W H MANI. LOWER

NOVELLUS 10-046843-00 C1W H MANI. UPPER

NOVELLUS 10-046844-00 C1W MOD MANI. UPPER

NOVELLUS 10-046845-00 C1W STO INLET MAN

NOVELLUS 10-046849-00 DD GASBOX STNO FILTER WELD

NOVELLUS 10-046851-00 DD GASBOX STN0 OUTLET WELD

NOVELLUS 10-046853-00 DD GASBOX STNO AR INLET WELD

NOVELLUS 10-046854-00 DD GASBOX STNO GAGE WELD

NOVELLUS 10-051632-00 TUBE ASSY,SHORT SPOOL,NUPRO

NOVELLUS 10-053060-00 TUBE ASSY PRESSURE CONTROL

NOVELLUS 1077642-71 RF GENERATOR CABLE

NOVELLUS 12-8872-054 ASSY,CBL,L&R WAFER SENSE

NOVELLUS 13-332016-00 NUT,WING,3/8-16

NOVELLUS 13-46870-01 CRESENT PIN CARRIAGE

NOVELLUS 13-8082-039 ROLLER, END CAP SUPPORT DUA

NOVELLUS 13-8092-337 SCREW ONTRAK LEAD W/NUT V3-2

NOVELLUS 13-8872-027 BLOCK,STOPPER,LOCATOR

NOVELLUS 1420-717038 RING,WEAR,PBT

NOVELLUS 1420-717052 RING, TOP CLAMP

NOVELLUS 15-00019-02 FLANGE, BLANKOFF, ALUM

NOVELLUS 15-00068-01 PADDLE ASSY, 150MM

NOVELLUS 15-00126-00 BRACKET

NOVELLUS 15-00311-00 NICKEL CAP NUT

NOVELLUS 15-00341-00 NICKEL HEX HEAD BOLT, 1/4-20 THREAD

NOVELLUS 15-00368-00 GENEVA DRIVE FLANGED SHAFT

NOVELLUS 15-00371-00 NICKEL 1/4-20 HEX NUT

NOVELLUS 15-00391-00 BUSHING, CERAMIC UPPER

NOVELLUS 15-00403-00 WTM UPPER ARM FIXTURE(TWO

NOVELLUS 15-00413-00 SPLINE ASSY THRUST WASHER

NOVELLUS 15-00416-00 SPACER, VACUUM (4IN)

NOVELLUS 15-00480-00 GENEVA DRIVER

NOVELLUS 15-00501-00 COUPLER OAR NUT V4-6

NOVELLUS 15-00511-00 SPACER ROTATION SHAFT

NOVELLUS 15-00539-00 SEAL,COVER

NOVELLUS 15-00554-31 SHIM, HEATER, 0.031" V-TYPE

NOVELLUS 15-00556-01 BRKT,DISCON

NOVELLUS 15-00578-00 SLEEVE, FLANGED, AC FEEDTHRU, CERAMIC

NOVELLUS 15-00600-00 SCREW 15-00600-00

NOVELLUS 15-00641-00 SHAFT, 3/8 ROT. DRIVE

NOVELLUS 15-00655-00 SINDLE ALIGN BLOCK

NOVELLUS 15-00655-00 SINDLE ALIGN BLOCK

NOVELLUS 15-00686-00 FEEDTHRU WASHERS

NOVELLUS 15-00688-00 WASHER, FEEDTHRU, 1/2" ID, ALUM

NOVELLUS 15-00702-00 FORK,TOP PLATE

NOVELLUS 15-00774-00 BKT,ADAPTOR-LEMO

NOVELLUS 15-00830-00 FITTING 90 DEGREE 3/8 TUBE

NOVELLUS 15-00835-00 PLATFORM - LIFT PIN WCVD

NOVELLUS 15-00921-00 COLLAR FITTING

NOVELLUS 15-00928-00 CLAMP OUTER RING

NOVELLUS 15-00931-00 PLATE, RING LIFT, EXCLUSION OPTION

NOVELLUS 15-00931-00 PLATE, RING LIFT, EXCLUSION OPTION

NOVELLUS 15-00935-00 SCREW-10-32X.50 LG N

NOVELLUS 15-00943-00 CLAMP, HEEL

NOVELLUS 15-00944-00 CLAMP, TOE

NOVELLUS 15-00975-00 LIFT PIN LOAD STATION

NOVELLUS 15-01022-00 PLATE R.F DIST, COPPER

NOVELLUS 15-01036-00 Bracket

NOVELLUS 15-01063-00 BRACKET, PADDLE, 200MM

NOVELLUS 15-01085-02 BRACKET,FRONT,RIGHT

NOVELLUS 15-01101-00 HUB, WAFER INDEXER 8"

NOVELLUS 15-01103-00 SHAFT,RING,LIFT,INNER

NOVELLUS 15-01136-00 BKT,ARM CASSETTE

NOVELLUS 15-01137-00 BLANK OFF, VERITY EP

NOVELLUS 15-01137-00 BLANK OFF, VERITY EP

NOVELLUS 15-01139-00 RING, WINDOW

NOVELLUS 15-01142-00 WINDOW, ROUND

NOVELLUS 15-01160-00 Bracket, WOPS Sensor

NOVELLUS 15-01163-00 BRACKET REAR CASSETTE V4-3

NOVELLUS 15-01167-00 BRACKET ARM/PADDLE V3-6

NOVELLUS 15-01169-00 CLAMP,TUBE-DUAL

NOVELLUS 15-01170-00 BRKT,DUAL

NOVELLUS 15-01175-00 BLADE REAR CASSETTE HOLDER

NOVELLUS 15-024198-00 CERAMIC RING

NOVELLUS 15-024611-00 PADDLE 200MM

NOVELLUS 15-024881-00 FORK END CAP

NOVELLUS 15-024881-00 FORK END CAP

NOVELLUS 15-024924-01 CERAMIC CLAMP

NOVELLUS 15-024924-02 CERAMIC CLAMP

NOVELLUS 15-027004-00 PLUG, COVER, HEATER, SCREW

NOVELLUS 15-028207-00 NUT, SEAL RETAINER

NOVELLUS 15-029071-00 ADAPTER XRING, LOCATOR

NOVELLUS 15-029506-00 Flange, Verity, Endpoint

NOVELLUS 15-029601-00 BRACKET MTG UPS BROOKS 5866

NOVELLUS 15-029856-00 EVAPORATOR BODY, CVD TIN

NOVELLUS 15-032577-02 PIN,SPEED ESC FR/DC

NOVELLUS 15-033198-00 ROD, CERAMIC, PEDESTAL

NOVELLUS 15-033385-00 RING DOME BASE

NOVELLUS 15-033755-00 TOOL ALIGN INLIGNER PADDLE

NOVELLUS 15-034084-02 SUPPORT, HOIST, UPPER

NOVELLUS 15-034104-00 COOL STATION ASSEMBLY

NOVELLUS 15-034532-01 WINDOW, PANEL

NOVELLUS 15-034848-00 HUB LOWER INDEXER

NOVELLUS 15-034849-00 RETAINER, SEAL

NOVELLUS 15-034852-00 SPACER, BUSHING

NOVELLUS 15-034964-00 BEARING BROOKS ROBOT WRIST

NOVELLUS 15-038324-00 SHIELD PESTAL LEAD WIRE

NOVELLUS 15-041085-00 RING,GUARD,200MM,FLATTED

NOVELLUS 15-041335-00 TOOL,ALIGN, 200MM

NOVELLUS 15-041335-00 TOOL,ALIGN, 200MM

NOVELLUS 15-042148-00 PLENUM, PURGE, TOP

NOVELLUS 15-042159-00 TUBE, CERAMIC

NOVELLUS 15-042166-00 SPINDLE WHEEL BOTTOM PLATE

NOVELLUS 15-042167-00 SPINDLE WHEEL TOP PLATE

NOVELLUS 15-042256-00 FINGER, FORK, CERAMIC, LOW CONTACT

NOVELLUS 15-042268-00 WINDOW, ETCH RESIST, QUARTZ

NOVELLUS 15-042271-00 PLEXI GUARD

NOVELLUS 15-045534-00 PLUG HOLE RF DIST BOX

NOVELLUS 15-046056-00 BOLT 1/4-20X1.0

NOVELLUS 15-046123-00 CLEVIS, HOIST ACTUATOR

NOVELLUS 15-046857-00 DD GBOX STN0 MFC MNT PLATE

NOVELLUS 15-046858-00 DD GBOX STN0 MFC MNT BRKT

NOVELLUS 15-051711-25 TUBE,INJECTOR,2.500

NOVELLUS 15-052614-00 TONG, RINGLIFT 200MM

NOVELLUS 15-054595-00 SCREW 1/4  28 GUIDE CERAMIC

NOVELLUS 15-055720-00 SPACER BUSHING

NOVELLUS 15-101294-00 SPING, CENTER

NOVELLUS 15-10324-00 BUTTON,PIN (CERAMIC)

NOVELLUS 15-10379-00 BLANKOFF,SENSOR

NOVELLUS 15-10483-00 BRACKET

NOVELLUS 15-10489-00 CLAMP, CHAMBER VIEWPORT

NOVELLUS 15-10524-00 TIC, BLOCK TRANSFER MODULE

NOVELLUS 15-10628-00 RING, EXCLUSION, PLATE

NOVELLUS 15-10667-00 RING, EXCLUSION

NOVELLUS 15-108174-00 CUP, SCREW COVER

NOVELLUS 15-10837-00 COVER, VAT, VIEWPORT

NOVELLUS 15-10837-00 COVER, VAT, VIEWPORT

NOVELLUS 15-11030-00 CLAMP,RING,FEEDTHRU

NOVELLUS 15-11031-00 FEEDTHRU,TOP

NOVELLUS 15-110526-00 PIN, POWER RLVD

NOVELLUS 15-11109-00 CLAMP,RING,INNER

NOVELLUS 15-11135-00 SENSOR WINDOW MAP

NOVELLUS 15-11350-00 FLANGE, MESC, INTERFACE, CVD-D

NOVELLUS 15-11616-03 TOOL WAFER CNTRNG 200MM .38DIA

NOVELLUS 15-11658-00 SHAFT,INSULATED,EXTENDER

NOVELLUS 15-118451-00 AERA MFC BRACKET (CLEAR AODINE)

NOVELLUS 15-119059-00 Bolt 1/4-20 1/4 Nickel

NOVELLUS 15-124538-00 LOUVER SCREEN BRACKET

NOVELLUS 15-132969-00 PIN,.250 x.95,#8-32

NOVELLUS 15-135655-01 END EFFECTOR R L/LK, VCTR

NOVELLUS 15-138402-00 MOER RING 2.75 MM

NOVELLUS 15-154040-00 CU/P.040-.065(PRAXAIR)

NOVELLUS 15-154040-00 CU/P.040-.065(PRAXAIR)

NOVELLUS 15-2673 DRIVE,BELT,ROTATOR,ERGO

NOVELLUS 15355-01 ADAPTER-TRANSDUCER QUARTZ IPC

NOVELLUS 15651-01 CABLE, FAN

NOVELLUS 15884-02 PWA EOP DETECTOR

NOVELLUS 15884-02 PWA EOP DETECTOR

NOVELLUS 16-00089-00 PLATE, GAS DISTRIBUTION, TOP

NOVELLUS 16-00092-00 STRAP HEATER FEEDTHRU

NOVELLUS 16-00197-00 FLOPPY MOUNTING BRACKET

NOVELLUS 16-00198-00 FLOPPY MOUNTING BRACKET

NOVELLUS 16-024771-00 FLANGE EXHAUST

NOVELLUS 16-029844-00 DISTRIBUTOR ASSY ALSO w/ 16-029846-00 & 16-029845-00

NOVELLUS 16-029846-00 DISTRIBUTOR BOTTOM

NOVELLUS 16-033105-00 PLATE, SEAL PEDESTAL

NOVELLUS 16-033105-00 PLATE, SEAL PEDESTAL

NOVELLUS 16-034002-00 HONEYCOMB DISK

NOVELLUS 16-034459-00 SHELF IOC SUPPORT

NOVELLUS 16-041993-00 SPACER 4 VACUUM

NOVELLUS 16-046933-00 BRKT,STN

NOVELLUS 16-049511-00 SHOWERHEAD

NOVELLUS 16-049525-00 SHOWERHEAD

NOVELLUS 16-10253-00 SHOWERHEAD

NOVELLUS 16-139965-00 WELDMENT,DIFFUSER,200mm (HIGH ACID)

NOVELLUS 16-148547-00 CHUCK,PEM,EBR,200MM

NOVELLUS 16-159097-00 CHUCK,PEM,200MM,HRU

NOVELLUS 16-167627-00 FILTER

NOVELLUS 16065-01 HARNESS ASSY, LIFT SENSOR

NOVELLUS 162-41-012A ARM BLOCK

NOVELLUS 16531-01 ROD DIFFUSER,QTZ LAMP

NOVELLUS 16875-01 CABLE,ASSY J4 EXH INTLK

NOVELLUS 16877-01 CABLE,ASSY SIG-REM DISPLAY

NOVELLUS 17-00091-00 RETAINER BRACKET

NOVELLUS 17-00094-00 STRAP RF

NOVELLUS 17-00106-00 COVER LIFT MOTOR

NOVELLUS 17-00194-00 BRACKETS

NOVELLUS 17-00286-00 FLAT CABLE

NOVELLUS 17-00316-00 CABLE, BRACKET

NOVELLUS 17-024406-00 BRKT.SWITCH PLATFORM

NOVELLUS 17-034429-01 PANEL, SIDE

NOVELLUS 17-034430-01 PANEL, SIDE

NOVELLUS 17-045011-00 FLAG,CASSETTE

NOVELLUS 17-050152-00 BOX

NOVELLUS 17-103642-00 Heater Isolation Box

NOVELLUS 17-10450-00 BRACKET SWITCH PANEL INTERLOCK

NOVELLUS 17-10480-00 FLAG,CASS

NOVELLUS 17-10515-00 STRAP,SHUNT,CAPACITOR

NOVELLUS 17-112594-00 RTNR KEYBOARD TRAY DLCM-S

NOVELLUS 17-112873-00 CU,CONTACT, CONE UP, FLAT

NOVELLUS 17-11496-01 COVER

NOVELLUS 17-118866-00 SCREEN RF SHIELD ETCHED OEP

NOVELLUS 17-145723-00 BRACKET, POWER SUPPLY

NOVELLUS 17-16938-02 CONTROL EXHAUST KIT

NOVELLUS 17-267445-00 MOUNTING BRACKET

NOVELLUS 17-275970-00 BRACKET MOUNTING PWR SUPPLY

NOVELLUS 17-276299-00 24 V DC POWER SUPPLY MOUNT

NOVELLUS 17-53971-01 D.C. SERVO MOTOR

NOVELLUS 17-68876-01 PCB,SECSI/11 ARTIC

NOVELLUS 17559-01 CABLE MAGNETRON HIGH VOLTAGE

NOVELLUS 17818-02 REFLECTOR TRAY BULB

NOVELLUS 18-010968 FLIPPER,ASSY,INTERGRATED

NOVELLUS 18-0871-07 SCREW,8-32X5/8,LG,SHC,SST (PACK OF 10)

NOVELLUS 19-00017-00 GUIDE BAFFLE

NOVELLUS 19-00034-00 GEAR INNER SHAFT

NOVELLUS 19-00058-00 Pulley, Timing

NOVELLUS 19-00060-00 BEARING

NOVELLUS 19-00071-00 TUBE, FITTING INS FEMALE 1/16

NOVELLUS 19-00111-00 ONE ARM ROBOT LEADSCREW (W/NUT)

NOVELLUS 19-00121-00 CAPACITER, RF DIS